Inventor
LEE JONG-HAW
KR2 patents
Patents
2 patentsUS7275905B2Oct 2, 2007
Method and device for controlling position of cassette in semiconductor manufacturing equipment
SAMSUNG ELECTRONICS CO LTD12 citations76
US7685963B2Mar 30, 2010
Method of and apparatus for dispensing photoresist in manufacturing semiconductor devices or the like
SAMSUNG ELECTRONICS CO LTD7 citations69