Inventor
KOSCHE SERGE
US3 patents
Patents
3 patentsUS9679749B2Jun 13, 2017
Gas distribution device with actively cooled grid
LAM RES CORP4 citations68
US12347650B2Jul 1, 2025
Substrate processing system including dual ion filter for downstream plasma
LAM RES CORP0 citations59
US11967486B2Apr 23, 2024
Substrate processing system including dual ion filter for downstream plasma
LAM RES CORP0 citations59