Inventor

WEBER HERIBERT

DE88 patents

⚠️ This page may combine multiple inventors who share the name “WEBER HERIBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WEBER HERIBERT

BOSCH GMBH ROBERT

Method for production of a semiconductor component and a semiconductor component produced by said method

Micromechanical component with different doping types so that one type is anodized into porous silicon

Device for measuring the mass of a medium flowing in a line

Sensor having a membrane

Micromechanical structural element having a diaphragm and method for producing such a structural element

Method for producing a semiconductor component and a semiconductor component produced according to the method

Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method

Semiconductor component and a method for producing the same

Method of producing a semiconductor sensor component

Method for producing micromechanic sensors and sensors produced by said method

Mass flow sensor having an improved membrane stability

Mass flow sensor

Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor

Micromechanical component and pressure sensor having a component of this type

Micromechanical component and manufacturing method

Method for manufacturing a sensor having a membrane

Process for producing a sensor membrane substrate

Micromechanical component for a capacitive sensor device, and manufacturing method for a micromechanical component for a capacitive sensor device

Micromechanical component and corresponding production method

Micromechanical component

Pressure sensor featuring pressure loading of the fastening element

Conductor path contacting arrangement and method

Micromechanical component for a capacitive pressure sensor device

MEMS capacitive sensor including improved contact separation

Micromechanical component and method for manufacturing a micromechanical component

Micromechanical pressure sensor device including a diaphragm system and corresponding manufacturing method

Micromechanical component and method for producing a micromechanical component

Micromechanical component for a sensor and/or microphone device

Micromechanical component for a sensor device having a capacitor sealing structure

Bonding pad layer system, gas sensor and method for manufacturing a gas sensor

Method for manufacturing a micromechanical component

BUEHLER AG

Roller groups for grinding devices, grinding devices, and methods

Roller groups for grinding devices, grinding devices, and methods

Roller groups for grinding devices, grinding devices, and methods

PARAGON AG

Micromechanical component

Microstructured chemical sensor

WEBER HERIBERT

Hybrid integrated pressure sensor component

Hybrid integrated component and method for the manufacture thereof

TELEFUNKEN MICROELECTRON

Micromechanical acceleration sensor

AHLES MARCUS

Sensor system, method for operating a sensor system, and method for manufacturing a sensor system

BENZEL HUBERT

Method for producing a semiconductor component and a semiconductor component produced according to the method

SULZER AG

Loom sley drive

PINTER STEFAN

Magnetically drivable micromirror

REINMUTH JOCHEN

Component having through-hole plating, and method for its production

FREY JENS

Sensor module

SIEMENS AG

Method and equipment for vacuum monitoring in vacuum switching tubes

KNESE KATHRIN

Micromechanical component and corresponding production method

PIRK TJALF

Micromechanical component having an inclined structure and corresponding manufacturing method

SCHEUERER ROLAND

Capacitive acceleration sensor having a movable mass and a spring element

SCHLOSSER ROMAN

Method for producing a micromechanical component and mircomechanical component