Inventor
FROMMER AVIV
IL7 patents
⚠️ This page may combine multiple inventors who share the name “FROMMER AVIV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
3 patentsUS7528953B2May 5, 2009
Target acquisition and overlay metrology based on two diffracted orders imaging
KLA TENCOR TECH CORP10 citations83
US7684039B2Mar 23, 2010
Overlay metrology using the near infra-red spectral range
KLA TENCOR TECH CORP11 citations82
US7526749B2Apr 28, 2009
Methods and apparatus for designing and using micro-targets in overlay metrology
KLA TENCOR TECH CORP6 citations62