Inventor
POON ALEX KA TIM
US30 patents
⚠️ This page may combine multiple inventors who share the name “POON ALEX KA TIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
21 patentsUS7292313B2Nov 6, 2007
Apparatus and method for providing fluid for immersion lithography
NIKON CORP141 citations99
US8743343B2Jun 3, 2014
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
NIKON CORP31 citations92
US7576833B2Aug 18, 2009
Gas curtain type immersion lithography tool using porous material for fluid removal
NIKON CORP21 citations92
US6917412B2Jul 12, 2005
Modular stage with reaction force cancellation
NIKON CORP22 citations92
US6791669B2Sep 14, 2004
Positioning device and exposure apparatus including the same
NIKON CORP49 citations92
US6281655B1Aug 28, 2001
High performance stage assembly
NIKON CORP47 citations92
US9547243B2Jan 17, 2017
Apparatus and method for providing fluid for immersion lithography
NIKON CORP3 citations84
US7532309B2May 12, 2009
Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid
NIKON CORP15 citations84
US6989887B2Jan 24, 2006
Dual force mode fine stage apparatus
NIKON CORP11 citations76
US9329492B2May 3, 2016
Apparatus and method to control vacuum at porous material using multiple porous materials
NIKON CORP3 citations73
US7929109B2Apr 19, 2011
Apparatus and method for recovering liquid droplets in immersion lithography
NIKON CORP5 citations73
US8896807B2Nov 25, 2014
Apparatus and method for providing fluid for immersion lithography
NIKON CORP2 citations63
US8054448B2Nov 8, 2011
Apparatus and method for providing fluid for immersion lithography
NIKON CORP3 citations63
US9176394B2Nov 3, 2015
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
NIKON CORP3 citations62
US7751026B2Jul 6, 2010
Apparatus and method for recovering fluid for immersion lithography
NIKON CORP4 citations62
US10203610B2Feb 12, 2019
Apparatus and method for providing fluid for immersion lithography
NIKON CORP0 citations52
US9817319B2Nov 14, 2017
Apparatus and method for providing fluid for immersion lithography
NIKON CORP0 citations52
US7375800B2May 20, 2008
Non-contact pneumatic transfer for stages with small motion
NIKON CORP0 citations52
US9217933B2Dec 22, 2015
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
NIKON CORP0 citations51
US7283200B2Oct 16, 2007
System and method for measuring displacement of a stage
NIKON CORP0 citations51
US11092170B2Aug 17, 2021
Dual valve fluid actuator assembly
NIKON CORP0 citations47
POON ALEX KA TIM
9 patentsUS8934080B2Jan 13, 2015
Apparatus and methods for recovering fluid in immersion lithography
POON ALEX KA TIM33 citations93
US8610873B2Dec 17, 2013
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate
POON ALEX KA TIM26 citations92
US8289497B2Oct 16, 2012
Apparatus and methods for recovering fluid in immersion lithography
POON ALEX KA TIM35 citations92
US8068209B2Nov 29, 2011
Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool
POON ALEX KA TIM34 citations89
US8520187B2Aug 27, 2013
Apparatus and method for providing fluid for immersion lithography
POON ALEX KA TIM4 citations73
US8634055B2Jan 21, 2014
Apparatus and method to control vacuum at porous material using multiple porous materials
POON ALEX KA TIM2 citations62
US8477284B2Jul 2, 2013
Apparatus and method to control vacuum at porous material using multiple porous materials
POON ALEX KA TIM3 citations62
US9285683B2Mar 15, 2016
Apparatus and method for providing fluid for immersion lithography
POON ALEX KA TIM0 citations52
US8780323B2Jul 15, 2014
Apparatus and method for recovering liquid droplets in immersion lithography
POON ALEX KA TIM0 citations51