Inventor
PARK KEE-SOO
KR4 patents
Patents
4 patentsUS10196738B2Feb 5, 2019
Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the system
SAMSUNG ELECTRONICS CO LTD11 citations82
US7335601B2Feb 26, 2008
Method of processing an object and method of controlling processing apparatus to prevent contamination of the object
SAMSUNG ELECTRONICS CO LTD9 citations82
US10541182B2Jan 21, 2020
Method of inspecting semiconductor substrate and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations65
US12283497B2Apr 22, 2025
Semiconductor deposition monitoring device
SAMSUNG ELECTRONICS CO LTD0 citations47