Inventor
HORI TSUKASA
JP40 patents
⚠️ This page may combine multiple inventors who share the name “HORI TSUKASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
30 patentsUS9167678B2Oct 20, 2015
System and method for generating extreme ultraviolet light
GIGAPHOTON INC8 citations84
US8710475B2Apr 29, 2014
Extreme ultraviolet light source device and method for generating extreme ultraviolet light
GIGAPHOTON INC7 citations84
US10629414B2Apr 21, 2020
Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator
GIGAPHOTON INC2 citations73
US10631393B2Apr 21, 2020
Chamber device and extreme ultraviolet light generating device
GIGAPHOTON INC3 citations73
US10306743B1May 28, 2019
System and method for generating extreme ultraviolet light
GIGAPHOTON INC1 citations73
US9894744B2Feb 13, 2018
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC3 citations73
US9883574B2Jan 30, 2018
Target producing apparatus
GIGAPHOTON INC2 citations73
US9854658B2Dec 26, 2017
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC2 citations73
US8742380B2Jun 3, 2014
Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target
GIGAPHOTON INC5 citations73
US10028366B2Jul 17, 2018
Extreme UV light generation device and target recovery apparatus
GIGAPHOTON INC2 citations70
US11360391B2Jun 14, 2022
Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations62
US10506697B2Dec 10, 2019
Extreme ultraviolet light generation device
GIGAPHOTON INC1 citations61
US10251253B2Apr 2, 2019
Extreme ultraviolet light generation device
GIGAPHOTON INC1 citations61
US11363706B2Jun 14, 2022
Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US11320740B2May 3, 2022
Target supply device, target supply method, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US11310899B2Apr 19, 2022
Target supply device, target supply method, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US11043784B2Jun 22, 2021
Laser apparatus and EUV light generation system
GIGAPHOTON INC0 citations52
US10512149B2Dec 17, 2019
Extreme UV light generation device
GIGAPHOTON INC0 citations52
US10251255B2Apr 2, 2019
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US10117317B2Oct 30, 2018
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US10028365B2Jul 17, 2018
Chamber device, target generation method, and extreme ultraviolet light generation system
GIGAPHOTON INC1 citations52
US9877378B2Jan 23, 2018
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US9699877B2Jul 4, 2017
Extreme ultraviolet light generation apparatus including target droplet joining apparatus
GIGAPHOTON INC1 citations52
US9497842B2Nov 15, 2016
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US9055657B2Jun 9, 2015
Extreme ultraviolet light generation by polarized laser beam
GIGAPHOTON INC1 citations52
US9860967B2Jan 2, 2018
Target supply apparatus, extreme ultraviolet light generating apparatus, and target supply method
GIGAPHOTON INC0 citations51
US10237961B2Mar 19, 2019
Target supply device, processing device and processing method therefor
GIGAPHOTON INC0 citations46
US10136509B2Nov 20, 2018
Target supply device, processing device and processing method thefefor
GIGAPHOTON INC0 citations46
US12567713B2Mar 3, 2026
Discharge electrode, method for manufacturing anode, and method for manufacturing electronic devices
GIGAPHOTON INC0 citations44
US10143074B2Nov 27, 2018
Filter and target supply apparatus
GIGAPHOTON INC0 citations37
KOMATSU MFG CO LTD
6 patentsUS6810061B2Oct 26, 2004
Discharge electrode and discharge electrode manufacturing method
KOMATSU MFG CO LTD32 citations92
US7782922B2Aug 24, 2010
Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
KOMATSU MFG CO LTD12 citations84
US6628693B1Sep 30, 2003
Discharge electrode for laser device
KOMATSU MFG CO LTD5 citations62
US6819699B1Nov 16, 2004
Arf excimer laser device, scanning type exposure device and ultraviolet laser device
KOMATSU MFG CO LTD5 citations61
US7006546B2Feb 28, 2006
Gas laser electrode, laser chamber employing the electrode, and gas laser device
KOMATSU MFG CO LTD0 citations52
US6507596B1Jan 14, 2003
Gas laser apparatus
KOMATSU MFG CO LTD0 citations41