Inventor
KAKIZAKI KOUJI
JP72 patents
⚠️ This page may combine multiple inventors who share the name “KAKIZAKI KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
25 patentsUS8003963B2Aug 23, 2011
Extreme ultraviolet light source apparatus
GIGAPHOTON INC21 citations92
US7999241B2Aug 16, 2011
Extreme ultraviolet light source apparatus
GIGAPHOTON INC40 citations92
US9167678B2Oct 20, 2015
System and method for generating extreme ultraviolet light
GIGAPHOTON INC8 citations84
US7382816B2Jun 3, 2008
Two-stage laser pulse energy control device and two-stage laser system
GIGAPHOTON INC10 citations84
US10306743B1May 28, 2019
System and method for generating extreme ultraviolet light
GIGAPHOTON INC1 citations73
US9812841B2Nov 7, 2017
Lasersystem
GIGAPHOTON INC5 citations73
US10074958B2Sep 11, 2018
Laser system
GIGAPHOTON INC4 citations72
US9742141B2Aug 22, 2017
Laser chamber
GIGAPHOTON INC6 citations72
US11469568B2Oct 11, 2022
Laser apparatus and laser processing system
GIGAPHOTON INC0 citations63
US9332625B2May 3, 2016
Extreme ultraviolet light source apparatus
GIGAPHOTON INC1 citations63
US8901524B2Dec 2, 2014
Extreme ultraviolet light source apparatus
GIGAPHOTON INC2 citations63
US8841641B2Sep 23, 2014
Extreme ultraviolet light source apparatus
GIGAPHOTON INC2 citations63
US12113326B2Oct 8, 2024
Laser device and electronic device manufacturing method
GIGAPHOTON INC0 citations62
US8934510B2Jan 13, 2015
Wavelength converter, wavelength converting device, solid state laser device, and laser system
GIGAPHOTON INC3 citations62
US8902948B2Dec 2, 2014
Polarization purity control device and gas laser apparatus provided with the same
GIGAPHOTON INC1 citations62
US6922428B2Jul 26, 2005
Gas laser apparatus for lithography
GIGAPHOTON INC2 citations62
US11465233B2Oct 11, 2022
Laser processing system and laser processing method
GIGAPHOTON INC0 citations52
US10251255B2Apr 2, 2019
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US10177520B2Jan 8, 2019
Excimer laser apparatus and excimer laser system
GIGAPHOTON INC0 citations52
US10117317B2Oct 30, 2018
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US9877378B2Jan 23, 2018
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US9853410B2Dec 26, 2017
Gas laser device and control method therefor
GIGAPHOTON INC0 citations52
US9837780B2Dec 5, 2017
Excimer laser apparatus and excimer laser system
GIGAPHOTON INC1 citations52
US9791780B2Oct 17, 2017
Exposure apparatus
GIGAPHOTON INC1 citations52
US9601893B2Mar 21, 2017
Laser apparatus
GIGAPHOTON INC0 citations52
NAGAI SHINJI
5 patentsUS8530869B2Sep 10, 2013
Extreme ultraviolet light source apparatus
NAGAI SHINJI7 citations84
US8891574B2Nov 18, 2014
Polarization purity control device and gas laser apparatus provided with the same
NAGAI SHINJI1 citations62
US8569723B2Oct 29, 2013
Extreme ultraviolet light source apparatus
NAGAI SHINJI4 citations62
US8503499B2Aug 6, 2013
Gas discharge chamber
NAGAI SHINJI2 citations62
US8165181B2Apr 24, 2012
Polarization purity control device and gas laser apparatus provided with the same
NAGAI SHINJI2 citations62
KAKIZAKI KOUJI
3 patentsHORI TSUKASA
2 patentsASAYAMA TAKESHI
2 patentsENDO AKIRA
2 patentsKOMATSU MFG CO LTD
2 patentsYANAGIDA TATSUYA
2 patentsYABU TAKAYUKI
2 patentsHAYASHI HIDEYUKI
1 patentNISHISAKA TOSHIHIRO
1 patentWATANABE YUKIO
1 patentISHIHARA TAKANOBU
1 patentGIGAPHOTON
1 patentShowing the top 50 of 72 patents by PatentIndex Score.