Inventor
MIZOGUCHI HAKARU
JP49 patents
⚠️ This page may combine multiple inventors who share the name “MIZOGUCHI HAKARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
21 patentsUS7067832B2Jun 27, 2006
Extreme ultraviolet light source
GIGAPHOTON INC33 citations93
US8785895B2Jul 22, 2014
Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus
GIGAPHOTON INC7 citations84
US7078717B2Jul 18, 2006
Light source device and exposure equipment using the same
GIGAPHOTON INC11 citations84
US10447001B2Oct 15, 2019
Laser unit
GIGAPHOTON INC2 citations73
US10306743B1May 28, 2019
System and method for generating extreme ultraviolet light
GIGAPHOTON INC1 citations73
US9465307B2Oct 11, 2016
Cleaning method for EUV light generation apparatus
GIGAPHOTON INC3 citations73
US9402297B2Jul 26, 2016
Extreme ultraviolet light generation system
GIGAPHOTON INC3 citations73
US8698114B2Apr 15, 2014
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device
GIGAPHOTON INC4 citations73
US12113326B2Oct 8, 2024
Laser device and electronic device manufacturing method
GIGAPHOTON INC0 citations62
US7984539B2Jul 26, 2011
Chamber replacing method
GIGAPHOTON INC3 citations62
US6639929B2Oct 28, 2003
Pulse oscillating gas laser device
GIGAPHOTON INC6 citations62
US10251255B2Apr 2, 2019
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US10117317B2Oct 30, 2018
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US9877378B2Jan 23, 2018
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US9497842B2Nov 15, 2016
System and method for generating extreme ultraviolet light
GIGAPHOTON INC0 citations52
US9362703B2Jun 7, 2016
Optical device, laser apparatus, and extreme ultraviolet light generation system
GIGAPHOTON INC0 citations52
US9373926B2Jun 21, 2016
Laser chamber and discharge excitation gas laser apparatus
GIGAPHOTON INC1 citations50
US9331450B2May 3, 2016
Laser apparatus
GIGAPHOTON INC0 citations50
US9954339B2Apr 24, 2018
Laser unit and extreme ultraviolet light generating system
GIGAPHOTON INC0 citations42
US9507248B2Nov 29, 2016
Two-beam interference apparatus and two-beam interference exposure system
GIGAPHOTON INC0 citations42
US9510434B2Nov 29, 2016
Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam
GIGAPHOTON INC0 citations41
KOMATSU MFG CO LTD
17 patentsUS5642374AJun 24, 1997
Excimer laser device
KOMATSU MFG CO LTD111 citations98
US5450436ASep 12, 1995
Laser gas replenishing apparatus and method in excimer laser system
KOMATSU MFG CO LTD123 citations97
US5754579AMay 19, 1998
Laser gas controller and charging/discharging device for discharge-excited laser
KOMATSU MFG CO LTD69 citations96
US5373523ADec 13, 1994
Excimer laser apparatus
KOMATSU MFG CO LTD58 citations96
US5557629ASep 17, 1996
Laser device having an electrode with auxiliary conductor members
KOMATSU MFG CO LTD94 citations95
US5535233AJul 9, 1996
Laser device
KOMATSU MFG CO LTD99 citations95
US6810061B2Oct 26, 2004
Discharge electrode and discharge electrode manufacturing method
KOMATSU MFG CO LTD32 citations92
US6130904AOct 10, 2000
Gas supplementation method of excimer laser apparatus
KOMATSU MFG CO LTD48 citations92
US6101211AAug 8, 2000
Narrow-band laser apparatus
KOMATSU MFG CO LTD31 citations92
US6008497ADec 28, 1999
Laser appartus
KOMATSU MFG CO LTD35 citations92
US5291509AMar 1, 1994
Gas laser apparatus
KOMATSU MFG CO LTD21 citations92
US6839373B1Jan 4, 2005
Ultra-narrow band flourine laser apparatus
KOMATSU MFG CO LTD24 citations89
US4571730AFeb 18, 1986
Cross flow type laser devices
KOMATSU MFG CO LTD16 citations74
US6337872B1Jan 8, 2002
Once through fan for excimer laser apparatus
KOMATSU MFG CO LTD13 citations72
US4745614AMay 17, 1988
Silent discharge type laser device
KOMATSU MFG CO LTD9 citations68
US5663977ASep 2, 1997
Gas laser apparatus
KOMATSU MFG CO LTD6 citations63
US6819699B1Nov 16, 2004
Arf excimer laser device, scanning type exposure device and ultraviolet laser device
KOMATSU MFG CO LTD5 citations61
MIZOGUCHI HAKARU
3 patentsUS8891161B2Nov 18, 2014
Optical device, laser apparatus, and extreme ultraviolet light generation system
MIZOGUCHI HAKARU6 citations82
US8779401B2Jul 15, 2014
Target supply unit
MIZOGUCHI HAKARU0 citations50
US8710473B2Apr 29, 2014
Droplet generation and detection device, and droplet control device
MIZOGUCHI HAKARU0 citations50