Inventor
HUGHES PANYIN
US2 patents
Patents
2 patentsUS7374636B2May 20, 2008
Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor
APPLIED MATERIALS INC21 citations91
US7316199B2Jan 8, 2008
Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber
APPLIED MATERIALS INC9 citations83