Inventor
MATSUO HISANORI
JP46 patents
⚠️ This page may combine multiple inventors who share the name “MATSUO HISANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
43 patentsUS6220945B1Apr 24, 2001
Polishing apparatus
EBARA CORP51 citations96
US6939208B2Sep 6, 2005
Polishing apparatus
EBARA CORP42 citations95
US9782870B2Oct 10, 2017
Polishing method and polishing apparatus
EBARA CORP34 citations94
US6942548B2Sep 13, 2005
Polishing method using an abrading plate
EBARA CORP27 citations93
US6712678B1Mar 30, 2004
Polishing-product discharging device and polishing device
EBARA CORP27 citations93
US6672945B1Jan 6, 2004
Polishing apparatus and dressing method
EBARA CORP25 citations93
US6458012B1Oct 1, 2002
Polishing apparatus
EBARA CORP18 citations93
US6413149B1Jul 2, 2002
Abrading plate and polishing method using the same
EBARA CORP31 citations93
US6402588B1Jun 11, 2002
Polishing apparatus
EBARA CORP42 citations93
US6390901B1May 21, 2002
Polishing apparatus
EBARA CORP51 citations93
US6336850B1Jan 8, 2002
Slurry dispenser and polishing apparatus
EBARA CORP28 citations93
US6217411B1Apr 17, 2001
Polishing apparatus
EBARA CORP33 citations93
US6196904B1Mar 6, 2001
Polishing apparatus
EBARA CORP19 citations93
US6190243B1Feb 20, 2001
Polishing apparatus
EBARA CORP36 citations93
US10035238B2Jul 31, 2018
Polishing method and polishing apparatus
EBARA CORP15 citations92
US7040968B2May 9, 2006
Polishing apparatus
EBARA CORP28 citations92
US6595831B1Jul 22, 2003
Method for polishing workpieces using fixed abrasives
EBARA CORP43 citations92
US10710208B2Jul 14, 2020
Polishing method and polishing apparatus
EBARA CORP4 citations84
US10195712B2Feb 5, 2019
Polishing method and polishing apparatus
EBARA CORP4 citations84
US6579148B2Jun 17, 2003
Polishing apparatus
EBARA CORP13 citations84
US9156130B2Oct 13, 2015
Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus
EBARA CORP11 citations83
US9108292B2Aug 18, 2015
Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus
EBARA CORP19 citations83
US8932883B2Jan 13, 2015
Method of measuring surface properties of polishing pad
EBARA CORP9 citations82
US8360817B2Jan 29, 2013
Polishing apparatus and polishing method
EBARA CORP7 citations80
US6626739B1Sep 30, 2003
Polishing method and polishing apparatus
EBARA CORP7 citations74
US6520845B2Feb 18, 2003
Polishing apparatus
EBARA CORP9 citations74
US6398626B1Jun 4, 2002
Polishing apparatus
EBARA CORP8 citations74
US6261162B1Jul 17, 2001
Polishing apparatus and method of manufacturing grinding plate
EBARA CORP11 citations74
US10369675B2Aug 6, 2019
CMP apparatus having polishing pad surface property measuring device
EBARA CORP3 citations73
US10259098B2Apr 16, 2019
Method and apparatus for polishing a substrate
EBARA CORP3 citations73
US9969046B2May 15, 2018
Method and apparatus for polishing a substrate
EBARA CORP3 citations73
US10414018B2Sep 17, 2019
Apparatus and method for regulating surface temperature of polishing pad
EBARA CORP4 citations72
US11926018B2Mar 12, 2024
Apparatus for polishing and method of polishing
EBARA CORP3 citations71
US9242339B2Jan 26, 2016
Polishing apparatus and polishing method
EBARA CORP4 citations67
US9393670B2Jul 19, 2016
Measuring method of surface roughness of polishing pad
EBARA CORP2 citations63
US6413155B2Jul 2, 2002
Polishing apparatus
EBARA CORP2 citations63
US7207864B2Apr 24, 2007
Polishing apparatus
EBARA CORP4 citations62
US12179312B2Dec 31, 2024
Apparatus for polishing, processing system, and method of polishing
EBARA CORP0 citations50
US10478936B2Nov 19, 2019
Method and apparatus for measuring surface properties of polishing pad
EBARA CORP0 citations48
US11897080B2Feb 13, 2024
Polishing apparatus
EBARA CORP0 citations47
US11897078B2Feb 13, 2024
Polishing apparatus, information processing system, polishing method, and computer-readable storage medium
EBARA CORP0 citations47
US9669515B2Jun 6, 2017
Polishing apparatus
EBARA CORP1 citations45
US10401285B2Sep 3, 2019
Apparatus for measuring surface properties of polishing pad
EBARA CORP0 citations40