Inventor
Eto Yohei
JP6 patents
Patents
6 patentsUS10414018B2Sep 17, 2019
Apparatus and method for regulating surface temperature of polishing pad
EBARA CORP4 citations72
US11380559B2Jul 5, 2022
Carrier device, work processing apparatus, control method of carrier device and storage medium storing program
EBARA CORP2 citations71
US10589398B2Mar 17, 2020
Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program
EBARA CORP6 citations71
US10475691B2Nov 12, 2019
Substrate transfer hand
EBARA CORP2 citations71
US11094548B2Aug 17, 2021
Apparatus for cleaning substrate and substrate cleaning method
EBARA CORP1 citations61
US12532694B2Jan 20, 2026
Substrate cleaning device and substrate processing device
EBARA CORP0 citations60