Inventor
CHEN ARTHUR Y
US4 patents
Patents
4 patentsUS6699399B1Mar 2, 2004
Self-cleaning etch process
APPLIED MATERIALS INC500 citations98
US6136211AOct 24, 2000
Self-cleaning etch process
APPLIED MATERIALS INC160 citations98
US6379575B1Apr 30, 2002
Treatment of etching chambers using activated cleaning gas
APPLIED MATERIALS INC375 citations97
US6872322B1Mar 29, 2005
Multiple stage process for cleaning process chambers
APPLIED MATERIALS INC81 citations94