Inventor
HAN JEWOO
KR6 patents
Patents
6 patentsUS12211672B2Jan 28, 2025
Apparatus and method for plasma etching
SAMSUNG ELECTRONICS CO LTD0 citations55
US11984304B2May 14, 2024
Apparatus and method for plasma etching
SAMSUNG ELECTRONICS CO LTD0 citations55
US11515193B2Nov 29, 2022
Etching apparatus
SAMSUNG ELECTRONICS CO LTD0 citations48
US11929239B2Mar 12, 2024
Plasma processing apparatus and semiconductor device manufacturing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US11450545B2Sep 20, 2022
Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US11251022B2Feb 15, 2022
Gas supply assembly and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations45