Inventor
YELLITZ BRADLEY J
US3 patents
Patents
3 patentsUS5645469AJul 8, 1997
Polishing pad with radially extending tapered channels
ADVANCED MICRO DEVICES INC120 citations96
US6722942B1Apr 20, 2004
Chemical mechanical polishing with electrochemical control
ADVANCED MICRO DEVICES INC68 citations92
US6093085AJul 25, 2000
Apparatuses and methods for polishing semiconductor wafers
ADVANCED MICRO DEVICES INC48 citations91