Inventor
ROODA JACOBUS EELKMAN
NL2 patents
Patents
2 patentsUS7184849B2Feb 27, 2007
Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program
ASML NETHERLANDS BV7 citations66
US7756597B2Jul 13, 2010
Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program
ASML NETHERLANDS BV4 citations54