Inventor

FANG RUIFANG

CN2 patents

Patents

2 patents

US9709896B2Jul 18, 2017

Illumination system for lithographic projection exposure step-and-scan apparatus

SHANGHAI INST OPTICS & FINE MECH CAS0 citations35

US9400433B2Jul 26, 2016

Lithography illumination system

SHANGHAI INST OPTICS & FINE MECH CAS0 citations32