Inventor

NAGATA YOZO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “NAGATA YOZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TANAKA ENGINEERING WORKS LTD

1 patent

US6313432B1Nov 6, 2001

Laser cutting method and laser cutter

TANAKA ENGINEERING WORKS LTD92 citations91

TOKYO ELECTRON LTD

1 patent

US10692782B2Jun 23, 2020

Control device, substrate processing system, substrate processing method, and program

TOKYO ELECTRON LTD0 citations37