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Inventor
Shi Zhu-bin
CN
2 patents
Patents
2 patents
US11249110B2
Feb 15, 2022
Resistivity probes with curved portions
KLA TENCOR CORP
0 citations
56
US10514391B2
Dec 24, 2019
Resistivity probe having movable needle bodies
KLA TENCOR CORP
1 citations
56