Inventor
UNTERWEGER JOSEF
AT5 patents
Patents
5 patentsUS10763151B2Sep 1, 2020
Wafer carrier, method for manufacturing the same and method for carrying a wafer
INFINEON TECHNOLOGIES AG0 citations50
US9917000B2Mar 13, 2018
Wafer carrier, method for manufacturing the same and method for carrying a wafer
INFINEON TECHNOLOGIES AG0 citations50
US10777444B2Sep 15, 2020
Wafer arrangement and method for processing a wafer
INFINEON TECHNOLOGIES AG0 citations49
US9966293B2May 8, 2018
Wafer arrangement and method for processing a wafer
INFINEON TECHNOLOGIES AG0 citations49
US10699934B2Jun 30, 2020
Substrate carrier, a processing arrangement and a method
INFINEON TECHNOLOGIES AG0 citations39