P

Inventor

ZHANG CHUNLEI

US71 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG CHUNLEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

27 patents
US11837479B2Dec 5, 2023

Advanced temperature control for wafer carrier in plasma processing chamber

APPLIED MATERIALS INC6 citations84
US10410889B2Sep 10, 2019

Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors

APPLIED MATERIALS INC7 citations84
US10378108B2Aug 13, 2019

Showerhead with reduced backside plasma ignition

APPLIED MATERIALS INC6 citations84
US9646843B2May 9, 2017

Tunable magnetic field to improve uniformity

APPLIED MATERIALS INC6 citations84
US10593518B1Mar 17, 2020

Methods and apparatus for etching semiconductor structures

APPLIED MATERIALS INC9 citations83
US7975558B2Jul 12, 2011

Method and apparatus for gas flow measurement

APPLIED MATERIALS INC9 citations83
US7743670B2Jun 29, 2010

Method and apparatus for gas flow measurement

APPLIED MATERIALS INC10 citations83
US10440777B2Oct 8, 2019

Azimuthally tunable multi-zone electrostatic chuck

APPLIED MATERIALS INC6 citations81
US7848840B2Dec 7, 2010

Method of controlling process parameters for semiconductor manufacturing apparatus

APPLIED MATERIALS INC8 citations75
US11532497B2Dec 20, 2022

High power electrostatic chuck design with radio frequency coupling

APPLIED MATERIALS INC3 citations73
US11127619B2Sep 21, 2021

Workpiece carrier for high power with enhanced edge sealing

APPLIED MATERIALS INC2 citations73
US10770270B2Sep 8, 2020

High power electrostatic chuck with aperture-reducing plug in a gas hole

APPLIED MATERIALS INC2 citations73
US10745807B2Aug 18, 2020

Showerhead with reduced backside plasma ignition

APPLIED MATERIALS INC3 citations73
US10242893B2Mar 26, 2019

Method and apparatus for de-chucking a workpiece using a swing voltage sequence

APPLIED MATERIALS INC2 citations73
US10504765B2Dec 10, 2019

Electrostatic chuck assembly having a dielectric filler

APPLIED MATERIALS INC2 citations72
US8895889B2Nov 25, 2014

Methods and apparatus for rapidly responsive heat control in plasma processing devices

APPLIED MATERIALS INC2 citations63
US11948826B2Apr 2, 2024

High power electrostatic chuck design with radio frequency coupling

APPLIED MATERIALS INC0 citations62
US10930540B2Feb 23, 2021

Electrostatic chuck assembly having a dielectric filler

APPLIED MATERIALS INC0 citations62
US12272575B2Apr 8, 2025

Advanced temperature control for wafer carrier in plasma processing chamber

APPLIED MATERIALS INC0 citations61
US11164723B2Nov 2, 2021

Methods and apparatus for etching semiconductor structures

APPLIED MATERIALS INC0 citations61
US10930471B2Feb 23, 2021

Methods and apparatus for etching semiconductor structures

APPLIED MATERIALS INC0 citations61
US10854425B2Dec 1, 2020

Feedforward temperature control for plasma processing apparatus

APPLIED MATERIALS INC1 citations61
US12585232B2Mar 24, 2026

Substrate support characterization to build a digital twin

APPLIED MATERIALS INC0 citations59
US12506024B2Dec 23, 2025

Method and mechanism for contact-free process chamber characterization

APPLIED MATERIALS INC0 citations59
US12442765B2Oct 14, 2025

Transmission corrected plasma emission using in-situ optical reflectometry

APPLIED MATERIALS INC0 citations59
US12031910B2Jul 9, 2024

Transmission corrected plasma emission using in-situ optical reflectometry

APPLIED MATERIALS INC0 citations59
US11622419B2Apr 4, 2023

Azimuthally tunable multi-zone electrostatic chuck

APPLIED MATERIALS INC0 citations59

Tencent America LLC

5 patents

GREE ELECTRIC APPLIANCES INC ZHUHAI

4 patents

ZHANG CHUNLEI

3 patents

Ningbo jielisi stationery co ltd

2 patents

HUAWEI TECH CO LTD

1 patent

MAHADESWARASWAMY CHETAN

1 patent

UNIV KENTUCKY RES FOUND

1 patent

KUNSHAN GOVISIONOX OPTOELECTRONICS CO LTD

1 patent

HEFEI VISIONOX TECH CO LTD

1 patent

BEIJING INSTITUTE TECH

1 patent

ZHUANG YAN

1 patent

PULSE ELECTRONICS INC

1 patent

BGI SHENZHEN CO LTD

1 patent

Showing the top 50 of 71 patents by PatentIndex Score.