Inventor

INAZUKI YUKIO

JP100 patents

⚠️ This page may combine multiple inventors who share the name “INAZUKI YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INAZUKI YUKIO

SHINETSU CHEMICAL CO

Photomask blank and photomask

Photomask blank, photomask, and method of manufacture

Phase shift mask blank, phase shift mask, and blank preparing method

Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method

Photomask blank

Photomask blank and photomask

Photomask blank, photomask and fabrication method thereof

Photomask blank, photomask and method for producing those

Photomask blank and photomask

Photomask blank and photomask

Methods of manufacturing photomask blank and photomask

Photomask blank, photomask and method of manufacture

Substrate defect inspection method and substrate defect inspection apparatus

Photomask blank and method for preparing photomask

Photomask blank, and preparation method thereof

Phase shift mask blank, phase shift mask, and blank preparing method

Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus

Halftone phase shift mask blank and halftone phase shift mask

Halftone phase shift photomask blank and making method

Halftone phase shift mask blank, halftone phase shift mask, and pattern exposure method

Halftone phase shift photomask blank and making method

Phase shift mask blank, phase shift mask, and methods of manufacture

Photomask blank

Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus

Phase-shift photomask-blank, phase-shift photomask and fabrication method thereof

Photomask blank and photomask

Phase shift mask blank, phase shift mask, and method of manufacture

Reflective mask blank, method of manufacturing thereof, and reflective mask

Photomask blank and method for preparing photomask

Halftone phase shift mask blank and halftone phase shift mask

Halftone phase shift mask blank and halftone phase shift mask

Photomask blank and photomask

Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method

Phase shift mask blank and method of manufacture

Phase shift mask and method of manufacture

Half-tone stacked film, photomask-blank, photomask and fabrication method thereof

Photomask blank, photomask and method of manufacture

Method for preparing photomask blank, photomask blank, method for preparing photomask, photomask, and metallic chromium target

Phase shift mask blank, phase shift mask, and pattern transfer method

SHINETSU HANDOTAI KK

Method of fabricating an SOI wafer and SOI wafer fabricated thereby

Method of fabricating an SOI wafer by hydrogen ion delamination without independent bonding heat treatment

TOPPAN PRINTING CO LTD

Photomask blank and photomask making method

Photomask blank and photomask making method

INAZUKI YUKIO

Photomask blank, photomask, and making method

Photomask blank and photomask

IGARASHI SHINICHI

Etching method and photomask blank processing method

Photomask making method

ISHIKAWAJIMA MASTER METAL KK

Vessel for making high-purity fine particles of active metals

SHIN ESTU CHEMICAL CO LTD

Photomask blank, photomask, and method of manufacture

ISHIKAWAJIMA HARIMA HEAVY IND

Method of detecting the presence of moisture in a gas