Inventor · disambiguated record
Michael Boger
Also filed as: BOGER MICHAEL · BOGER MICHAEL S · BOGER MICHAEL STEPHEN
5 granted patents·2 pending applications·56 citations·filing 1997–2005
80Inventor score
Top patents by PatentIndex Score
7 records- 0175US7140847B2Integrated high vacuum pumping systemBOC GROUP INC·Filed 2004·Granted Nov 28, 2006·15 cites·12 claims
- 0271US7021903B2Fore-line preconditioning for vacuum pumpsBOC GROUP INC·Filed 2004·Granted Apr 4, 2006·15 cites·25 claims
- 0368US7278831B2Apparatus and method for control, pumping and abatement for vacuum process chambersBOC GROUP INC·Filed 2003·Granted Oct 9, 2007·13 cites·25 claims
- 0465US7398127B2Systems and methods for facilitating wireless communication between various components of a distributed systemEDWARDS VACUUM INC·Filed 2005·Granted Jul 8, 2008·6 cites·20 claims
- 0537US2005042777A1Control of etch and deposition processesBOC GROUP INC·Filed 2003·Application pending·0 cites
- 0635US2005117165A1Semiconductor etching process controlBOC GROUP INC·Filed 2003·Application pending·0 cites
- 0727US5789663APorous medium test with tracer recharging and discharging through a single wellFiled 1997·Granted Aug 4, 1998·7 cites·8 claims
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