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Inventor
BOWERS JIM
US
2 patents
⚠️ This page may combine multiple inventors who share the name “BOWERS JIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
1 patent
US6630407B2
Oct 7, 2003
Plasma etching of organic antireflective coating
LAM RES CORP
58 citations
93
ELTRON RESEARCH INC
1 patent
US5830540A
Nov 3, 1998
Method and apparatus for reactive plasma surfacing
ELTRON RESEARCH INC
19 citations
86