Inventor

LAM SAI HUNG

CN2 patents

⚠️ This page may combine multiple inventors who share the name “LAM SAI HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM SAI HUNG

1 patent

US9293354B2Mar 22, 2016

Apparatus and method for calibrating lithography process

LAM SAI HUNG0 citations41

SEMICONDUCTOR MFG INT SHANGHAI

1 patent

US7701549B2Apr 20, 2010

Method and apparatus to prevent contamination of optical element by resist processing

SEMICONDUCTOR MFG INT SHANGHAI0 citations28