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Inventor
SIRAJUDDIN KHALID M
US
2 patents
⚠️ This page may combine multiple inventors who share the name “SIRAJUDDIN KHALID M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIRAJUDDIN KHALID M
1 patent
US8158522B2
Apr 17, 2012
Method of forming a deep trench in a substrate
SIRAJUDDIN KHALID M
10 citations
75
DINEV JIVKO
1 patent
US9023227B2
May 5, 2015
Increased deposition efficiency and higher chamber conductance with source power increase in an inductively coupled plasma (ICP) chamber
DINEV JIVKO
0 citations
44