Inventor

ZONNEVYLLE AERNOUT CHRISTIAAN

NL6 patents

⚠️ This page may combine multiple inventors who share the name “ZONNEVYLLE AERNOUT CHRISTIAAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KRUIT PIETER

2 patents

US8294117B2Oct 23, 2012

Multiple beam charged particle optical system

KRUIT PIETER27 citations91

US8895921B2Nov 25, 2014

Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus

KRUIT PIETER3 citations60

DELMIC B V

2 patents

US9378921B2Jun 28, 2016

Integrated optical and charged particle inspection apparatus

DELMIC B V4 citations66

US9715992B2Jul 25, 2017

Integrated optical and charged particle inspection apparatus

DELMIC B V3 citations65

ZONNEVYLLE AERNOUT CHRISTIAAN

1 patent

US9607806B2Mar 28, 2017

Charged particle multi-beam apparatus including a manipulator device for manipulation of one or more charged particle beams

ZONNEVYLLE AERNOUT CHRISTIAAN13 citations78

UNIV DELFT TECH

1 patent

US10453649B2Oct 22, 2019

Apparatus and method for inspecting a sample using a plurality of charged particle beams

UNIV DELFT TECH2 citations72