Inventor
KRUIT PIETER
NL92 patents
⚠️ This page may combine multiple inventors who share the name “KRUIT PIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MAPPER LITHOGRAPHY IP BV
18 patentsUS7129502B2Oct 31, 2006
Apparatus for generating a plurality of beamlets
MAPPER LITHOGRAPHY IP BV162 citations99
US7084414B2Aug 1, 2006
Charged particle beamlet exposure system
MAPPER LITHOGRAPHY IP BV118 citations98
US6958804B2Oct 25, 2005
Lithography system
MAPPER LITHOGRAPHY IP BV135 citations98
US6897458B2May 24, 2005
Electron beam exposure system
MAPPER LITHOGRAPHY IP BV144 citations97
US7091504B2Aug 15, 2006
Electron beam exposure system
MAPPER LITHOGRAPHY IP BV50 citations94
US7569833B2Aug 4, 2009
Apparatus for generating a plurality of beamlets
MAPPER LITHOGRAPHY IP BV13 citations93
US6919952B2Jul 19, 2005
Direct write lithography system
MAPPER LITHOGRAPHY IP BV33 citations93
US7842936B2Nov 30, 2010
Lithography system and projection method
MAPPER LITHOGRAPHY IP BV20 citations92
US7868300B2Jan 11, 2011
Lithography system, sensor and measuring method
MAPPER LITHOGRAPHY IP BV30 citations91
US7391037B2Jun 24, 2008
Apparatus for generating a plurality of beamlets
MAPPER LITHOGRAPHY IP BV7 citations74
US7365338B2Apr 29, 2008
Apparatus for generating a plurality of beamlets
MAPPER LITHOGRAPHY IP BV8 citations74
US7348567B1Mar 25, 2008
Apparatus for generating a plurality of beamlets
MAPPER LITHOGRAPHY IP BV6 citations74
US7019312B2Mar 28, 2006
Adjustment in a MAPPER system
MAPPER LITHOGRAPHY IP BV10 citations74
US8890094B2Nov 18, 2014
Projection lens arrangement
MAPPER LITHOGRAPHY IP BV6 citations73
US7612866B2Nov 3, 2009
Lithography system
MAPPER LITHOGRAPHY IP BV5 citations73
US6844560B2Jan 18, 2005
Lithography system comprising a converter plate and means for protecting the converter plate
MAPPER LITHOGRAPHY IP BV10 citations73
US9665013B2May 30, 2017
Lithography system, method of clamping and wafer table
MAPPER LITHOGRAPHY IP BV4 citations72
US7215070B2May 8, 2007
System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission
MAPPER LITHOGRAPHY IP BV5 citations71
UNIV DELFT TECH
6 patentsUS6335783B1Jan 1, 2002
Lithography system
UNIV DELFT TECH36 citations93
US10312052B2Jun 4, 2019
Multi electron beam inspection apparatus
UNIV DELFT TECH7 citations84
US6670611B1Dec 30, 2003
Electron microscope
UNIV DELFT TECH13 citations83
US10504687B2Dec 10, 2019
Signal separator for a multi-beam charged particle inspection apparatus
UNIV DELFT TECH4 citations73
US9449789B2Sep 20, 2016
Apparatus and method for inspecting a surface of a sample
UNIV DELFT TECH3 citations73
US10453649B2Oct 22, 2019
Apparatus and method for inspecting a sample using a plurality of charged particle beams
UNIV DELFT TECH2 citations72
PHILIPS CORP
6 patentsUS5587586ADec 24, 1996
Particle-optical apparatus comprising an electron source with a needle and a membrane-like extraction electrode
PHILIPS CORP25 citations93
US5578822ANov 26, 1996
Particle-optical apparatus comprising a detector for secondary electrons
PHILIPS CORP34 citations91
US4882486ANov 21, 1989
Electron detection with energy discrimination
PHILIPS CORP22 citations82
US4977324ADec 11, 1990
Charged particle beam apparatus
PHILIPS CORP8 citations74
US5838004ANov 17, 1998
Particle-optical apparatus comprising a fixed diaphragm for the monochromator filter
PHILIPS CORP16 citations69
US5003172AMar 26, 1991
Auger spectrometry
PHILIPS CORP7 citations68
KRUIT PIETER
4 patentsUS8134135B2Mar 13, 2012
Multiple beam charged particle optical system
KRUIT PIETER43 citations96
US8294117B2Oct 23, 2012
Multiple beam charged particle optical system
KRUIT PIETER27 citations91
US8598545B2Dec 3, 2013
Multiple beam charged particle optical system
KRUIT PIETER4 citations72
US8188450B2May 29, 2012
Multiple beam charged particle optical system
KRUIT PIETER4 citations72
DELMIC B V
3 patentsUS10651009B2May 12, 2020
Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscope
DELMIC B V4 citations66
US9378921B2Jun 28, 2016
Integrated optical and charged particle inspection apparatus
DELMIC B V4 citations66
US9715992B2Jul 25, 2017
Integrated optical and charged particle inspection apparatus
DELMIC B V3 citations65
APPLIED MATERIALS ISRAEL LTD
2 patentsTNO
2 patents(unassigned)
1 patentLUCENT TECHNOLOGIES INC
1 patentWIELAND MARCO JAN JACO
1 patentZONNEVYLLE AERNOUT CHRISTIAAN
1 patentFEI CO
1 patentKNIPPELS GUIDO MARTINUS HENRICUS
1 patentASML NETHERLANDS BV
1 patentMAPPER LIGHOGRAPHY IP B V
1 patentHITACHI HIGH TECH CORP
1 patentShowing the top 50 of 92 patents by PatentIndex Score.