P

Inventor

KRUIT PIETER

NL92 patents
⚠️ This page may combine multiple inventors who share the name “KRUIT PIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MAPPER LITHOGRAPHY IP BV

18 patents
US7129502B2Oct 31, 2006

Apparatus for generating a plurality of beamlets

MAPPER LITHOGRAPHY IP BV162 citations99
US7084414B2Aug 1, 2006

Charged particle beamlet exposure system

MAPPER LITHOGRAPHY IP BV118 citations98
US6958804B2Oct 25, 2005

Lithography system

MAPPER LITHOGRAPHY IP BV135 citations98
US6897458B2May 24, 2005

Electron beam exposure system

MAPPER LITHOGRAPHY IP BV144 citations97
US7091504B2Aug 15, 2006

Electron beam exposure system

MAPPER LITHOGRAPHY IP BV50 citations94
US7569833B2Aug 4, 2009

Apparatus for generating a plurality of beamlets

MAPPER LITHOGRAPHY IP BV13 citations93
US6919952B2Jul 19, 2005

Direct write lithography system

MAPPER LITHOGRAPHY IP BV33 citations93
US7842936B2Nov 30, 2010

Lithography system and projection method

MAPPER LITHOGRAPHY IP BV20 citations92
US7868300B2Jan 11, 2011

Lithography system, sensor and measuring method

MAPPER LITHOGRAPHY IP BV30 citations91
US7391037B2Jun 24, 2008

Apparatus for generating a plurality of beamlets

MAPPER LITHOGRAPHY IP BV7 citations74
US7365338B2Apr 29, 2008

Apparatus for generating a plurality of beamlets

MAPPER LITHOGRAPHY IP BV8 citations74
US7348567B1Mar 25, 2008

Apparatus for generating a plurality of beamlets

MAPPER LITHOGRAPHY IP BV6 citations74
US7019312B2Mar 28, 2006

Adjustment in a MAPPER system

MAPPER LITHOGRAPHY IP BV10 citations74
US8890094B2Nov 18, 2014

Projection lens arrangement

MAPPER LITHOGRAPHY IP BV6 citations73
US7612866B2Nov 3, 2009

Lithography system

MAPPER LITHOGRAPHY IP BV5 citations73
US6844560B2Jan 18, 2005

Lithography system comprising a converter plate and means for protecting the converter plate

MAPPER LITHOGRAPHY IP BV10 citations73
US9665013B2May 30, 2017

Lithography system, method of clamping and wafer table

MAPPER LITHOGRAPHY IP BV4 citations72
US7215070B2May 8, 2007

System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission

MAPPER LITHOGRAPHY IP BV5 citations71

UNIV DELFT TECH

6 patents

PHILIPS CORP

6 patents

KRUIT PIETER

4 patents

DELMIC B V

3 patents

APPLIED MATERIALS ISRAEL LTD

2 patents

TNO

2 patents

(unassigned)

1 patent

LUCENT TECHNOLOGIES INC

1 patent

WIELAND MARCO JAN JACO

1 patent

ZONNEVYLLE AERNOUT CHRISTIAAN

1 patent

FEI CO

1 patent

KNIPPELS GUIDO MARTINUS HENRICUS

1 patent

ASML NETHERLANDS BV

1 patent

MAPPER LIGHOGRAPHY IP B V

1 patent

HITACHI HIGH TECH CORP

1 patent

Showing the top 50 of 92 patents by PatentIndex Score.