Inventor
OKABE TSUTOMU
JP47 patents
⚠️ This page may combine multiple inventors who share the name “OKABE TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TDK CORP
25 patentsUS6641349B1Nov 4, 2003
Clean box, clean transfer method and system
TDK CORP44 citations96
US7841371B2Nov 30, 2010
Lid opening/closing system of an airtight container
TDK CORP31 citations92
US7789609B2Sep 7, 2010
Lid opening/closing system for closed container and substrate processing method using same
TDK CORP41 citations92
US7726353B2Jun 1, 2010
Lid opening/closing system of an airtight container
TDK CORP37 citations92
US6984839B2Jan 10, 2006
Wafer processing apparatus capable of mapping wafers
TDK CORP25 citations92
US6883770B1Apr 26, 2005
Load port mounting mechanism
TDK CORP20 citations92
US6796763B2Sep 28, 2004
Clean box, clean transfer method and system
TDK CORP29 citations92
US6390145B1May 21, 2002
Container and method for sealing the container
TDK CORP34 citations92
US7621714B2Nov 24, 2009
Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
TDK CORP11 citations84
US7379174B2May 27, 2008
Wafer detecting device
TDK CORP11 citations83
US8375998B2Feb 19, 2013
Lid opening/closing system of an airtight container
TDK CORP4 citations74
US7670095B2Mar 2, 2010
Wafer processing apparatus having dust proof function
TDK CORP6 citations74
US7607880B2Oct 27, 2009
Wafer processing apparatus having dust proof function
TDK CORP6 citations74
US7360985B2Apr 22, 2008
Wafer processing apparatus including clean box stopping mechanism
TDK CORP8 citations74
US6338604B1Jan 15, 2002
Lid latch mechanism for clean box
TDK CORP13 citations74
US11133208B2Sep 28, 2021
EFEM and method of introducing dry air thereinto
TDK CORP2 citations73
US10304702B2May 28, 2019
Efem
TDK CORP2 citations72
US7614840B2Nov 10, 2009
Wafer processing apparatus having dust proof function
TDK CORP3 citations63
US7537425B2May 26, 2009
Wafer processing apparatus having dust proof function
TDK CORP4 citations63
US11515177B2Nov 29, 2022
Circulating EFEM
TDK CORP0 citations62
US11049736B2Jun 29, 2021
Circulating EFEM
TDK CORP1 citations62
US10340157B2Jul 2, 2019
Mini-environment apparatus
TDK CORP1 citations62
US11145529B2Oct 12, 2021
EFEM and method of introducing replacement gas thereinto
TDK CORP0 citations52
US10090182B2Oct 2, 2018
Load port device and cleaning gas introducing method into a container on a load port
TDK CORP1 citations47
US10566227B2Feb 18, 2020
Controlling method for a wafer transportation part and a load port part on an EFEM
TDK CORP0 citations41
OKABE TSUTOMU
13 patentsUS8082955B2Dec 27, 2011
Lid opening/closing system of an airtight container
OKABE TSUTOMU17 citations92
US8302637B2Nov 6, 2012
Method of processing an object in a container and lid opening/closing system used in the method
OKABE TSUTOMU27 citations91
US8893753B2Nov 25, 2014
Substrate storage pod and lid member thereof, and processing apparatus for a substrate
OKABE TSUTOMU8 citations84
US8522836B2Sep 3, 2013
Substrate storage pod with replacement function of clean gas
OKABE TSUTOMU18 citations84
US8186927B2May 29, 2012
Contained object transfer system
OKABE TSUTOMU20 citations84
US8171964B2May 8, 2012
Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus
OKABE TSUTOMU15 citations84
US8061738B2Nov 22, 2011
Gas replacement system
OKABE TSUTOMU12 citations84
US8413693B2Apr 9, 2013
Lid opening/closing system of an airtight container
OKABE TSUTOMU4 citations74
US8657346B2Feb 25, 2014
Lid opening/closing system for closed container
OKABE TSUTOMU2 citations63
US8322759B2Dec 4, 2012
Closed container and lid opening/closing system therefor
OKABE TSUTOMU4 citations63
US9349627B2May 24, 2016
Lid opening/closing system for closed container and substrate processing method using same
OKABE TSUTOMU2 citations62
US8083456B2Dec 27, 2011
Contained object transfer system
OKABE TSUTOMU1 citations52
US9401295B2Jul 26, 2016
Load port apparatus and clamping device to be used for the same
OKABE TSUTOMU0 citations42
HITACHI LTD
7 patentsUS5841893ANov 24, 1998
Inspection data analyzing system
HITACHI LTD76 citations95
US6185322B1Feb 6, 2001
Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device
HITACHI LTD15 citations92
US5497331AMar 5, 1996
Semiconductor integrated circuit device fabrication method and its fabrication apparatus
HITACHI LTD46 citations92
US6330352B1Dec 11, 2001
Inspection data analyzing system
HITACHI LTD11 citations81
US6628817B2Sep 30, 2003
Inspection data analyzing system
HITACHI LTD9 citations73
US6529619B2Mar 4, 2003
Inspection data analyzing system
HITACHI LTD9 citations73
US6339653B1Jan 15, 2002
Inspection data analyzing system
HITACHI LTD7 citations73