Inventor
SASAKI MUTSUO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI MUTSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TDK CORP
7 patentsUS7360346B2Apr 22, 2008
Purging system and purging method for the interior of a portable type hermetically sealed container
TDK CORP30 citations91
US7379174B2May 27, 2008
Wafer detecting device
TDK CORP11 citations83
US9786531B2Oct 10, 2017
Gas purge unit, load port apparatus, and installation stand for purging container
TDK CORP3 citations72
US11515177B2Nov 29, 2022
Circulating EFEM
TDK CORP0 citations62
US11049736B2Jun 29, 2021
Circulating EFEM
TDK CORP1 citations62
US11135623B2Oct 5, 2021
Wafer transport container interior atmosphere measurement device, wafer transport container, wafer transport container interior cleaning device, and wafer transport container interior cleaning method
TDK CORP0 citations46
US9833817B2Dec 5, 2017
Gas purge unit, load port apparatus, and installation stand for purging container
TDK CORP0 citations41
SASAKI MUTSUO
3 patentsUS8251636B2Aug 28, 2012
Lid closing method for closed container and lid opening/closing system for closed container
SASAKI MUTSUO6 citations70
US8485771B2Jul 16, 2013
Load port apparatus and dust exhaust method for load port apparatus
SASAKI MUTSUO6 citations67
US9324595B2Apr 26, 2016
Load port apparatus and method of detecting object to be processed
SASAKI MUTSUO0 citations38