Inventor
UMEDA MASARU
JP38 patents
⚠️ This page may combine multiple inventors who share the name “UMEDA MASARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WATANABE M & CO LTD
10 patentsUS7673856B2Mar 9, 2010
Vaporizer and various devices using the same and an associated vaporizing method
WATANABE M & CO LTD18 citations92
US5518360AMay 21, 1996
Wafer carrying device and wafer carrying method
WATANABE M & CO LTD25 citations92
US6394733B1May 28, 2002
Substrate body transfer apparatus
WATANABE M & CO LTD27 citations91
US6315501B1Nov 13, 2001
Air stream particulate collecting transfer apparatus
WATANABE M & CO LTD23 citations91
US6540840B1Apr 1, 2003
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD
WATANABE M & CO LTD32 citations90
US7704019B2Apr 27, 2010
Levitation transportation device and levitation transportation method
WATANABE M & CO LTD8 citations84
US7246796B2Jul 24, 2007
Carburetor, various types of devices using the carburetor, and method of vaporization
WATANABE M & CO LTD6 citations73
US5921744AJul 13, 1999
Wafer carrying device and wafer carrying method
WATANABE M & CO LTD13 citations73
US6398464B1Jun 4, 2002
Air stream transfer apparatus
WATANABE M & CO LTD8 citations72
US7744698B2Jun 29, 2010
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD
WATANABE M & CO LTD0 citations50
OHMI TADAHIRO
9 patentsUS5110438AMay 5, 1992
Reduced pressure surface treatment apparatus
OHMI TADAHIRO113 citations96
US6074538AJun 13, 2000
Thin film forming equipment
OHMI TADAHIRO22 citations93
US5683072ANov 4, 1997
Thin film forming equipment
OHMI TADAHIRO24 citations93
US5362672ANov 8, 1994
Method of forming a monocrystalline film having a closed loop step portion on the substrate
OHMI TADAHIRO35 citations93
US5119541AJun 9, 1992
Wafer succeptor apparatus
OHMI TADAHIRO42 citations93
US4984060AJan 8, 1991
Semiconductor device wirings with hillocks
OHMI TADAHIRO26 citations93
US4977855ADec 18, 1990
Apparatus for forming film with surface reaction
OHMI TADAHIRO24 citations93
US5313982AMay 24, 1994
Gas supply piping device for a process apparatus
OHMI TADAHIRO42 citations87
US5160429ANov 3, 1992
Piping system for supplying ultra-pure water
OHMI TADAHIRO17 citations73
AIST
4 patentsUS10686043B2Jun 16, 2020
Method of making semiconductor ferroelectric memory element, and semiconductor ferroelectric memory transistor
AIST2 citations73
US9818869B2Nov 14, 2017
Ferroelectric device and method of its manufacture
AIST2 citations73
US11335783B2May 17, 2022
Method of making semiconductor ferroelectric memory element, and semiconductor ferroelectric memory transistor
AIST0 citations62
US11069713B2Jul 20, 2021
Semiconductor memory element, other elements, and their production methods
AIST1 citations62
(unassigned)
3 patentsTODA MASAYUKI
3 patentsUS6447217B1Sep 10, 2002
Substrate transfer device and operating method thereof
TODA MASAYUKI11 citations72
US8897627B2Nov 25, 2014
Carburetor, carburetor for MOCVD using same, center rod for use in the carburetor or carburetor for MOCVD, method for dispersing carrier gas, and method for vaporizing carrier gas
TODA MASAYUKI1 citations62
US8486196B2Jul 16, 2013
Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus
TODA MASAYUKI0 citations51