Inventor

SPLINTER PATRICK R

US2 patents

Patents

2 patents

US7759657B2Jul 20, 2010

Methods for implanting B22Hx and its ionized lower mass byproducts

AXCELIS TECH INC34 citations88

US7375355B2May 20, 2008

Ribbon beam ion implanter cluster tool

AXCELIS TECH INC2 citations60