Inventor

BUTAEVA EVGENIIA

US3 patents

Patents

3 patents

US11715622B2Aug 1, 2023

Material recovery systems for optical components

KLA CORP0 citations55

US11262664B2Mar 1, 2022

System and method for protecting optics from vacuum ultraviolet light

KLA CORP0 citations54

US12510692B2Dec 30, 2025

Protection of optical materials of optical components from radiation degradation

KLA CORP0 citations53