Inventor

DHAMODHARAN RAJA MURALI

IN2 patents

Patents

2 patents

US12492867B2Dec 9, 2025

Air shrouds with integrated heat exchanger

APPLIED MATERIALS INC0 citations54

US12428753B2Sep 30, 2025

Lift assemblies, and related methods and components, for substrate processing chambers

APPLIED MATERIALS INC0 citations42