Inventor
TSIANG MICHAEL WENYOUNG
US17 patents
Patents
17 patentsUS9816187B2Nov 14, 2017
PECVD process
APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016
PECVD process
APPLIED MATERIALS INC12 citations92
US10793954B2Oct 6, 2020
PECVD process
APPLIED MATERIALS INC3 citations84
US10060032B2Aug 28, 2018
PECVD process
APPLIED MATERIALS INC3 citations84
US11613812B2Mar 28, 2023
PECVD process
APPLIED MATERIALS INC2 citations73
US10515796B2Dec 24, 2019
Dry etch rate reduction of silicon nitride films
APPLIED MATERIALS INC2 citations73
US10236225B2Mar 19, 2019
Method for PECVD overlay improvement
APPLIED MATERIALS INC2 citations71
US9947599B2Apr 17, 2018
Method for PECVD overlay improvement
APPLIED MATERIALS INC2 citations71
US11898249B2Feb 13, 2024
PECVD process
APPLIED MATERIALS INC0 citations62
US11133177B2Sep 28, 2021
Oxidation reduction for SiOC film
APPLIED MATERIALS INC1 citations62
US11060189B2Jul 13, 2021
Method to enable high temperature processing without chamber drifting
APPLIED MATERIALS INC0 citations62
US12300554B2May 13, 2025
Systems and methods for analyzing defects in CVD films
APPLIED MATERIALS INC0 citations59
US11699623B2Jul 11, 2023
Systems and methods for analyzing defects in CVD films
APPLIED MATERIALS INC1 citations59
US10199388B2Feb 5, 2019
VNAND tensile thick TEOS oxide
APPLIED MATERIALS INC1 citations58
US11515150B2Nov 29, 2022
Hardmask tuning by electrode adjustment
APPLIED MATERIALS INC0 citations57
US11710631B2Jul 25, 2023
Tensile nitride deposition systems and methods
APPLIED MATERIALS INC0 citations48
US10483282B2Nov 19, 2019
VNAND tensile thick TEOS oxide
APPLIED MATERIALS INC0 citations47