Inventor
JHA PRAKET PRAKASH
US9 patents
Patents
9 patentsUS11615966B2Mar 28, 2023
Flowable film formation and treatments
APPLIED MATERIALS INC2 citations71
US11469100B2Oct 11, 2022
Methods of post treating dielectric films with microwave radiation
APPLIED MATERIALS INC0 citations62
US11170990B2Nov 9, 2021
Polysilicon liners
APPLIED MATERIALS INC0 citations61
US12300554B2May 13, 2025
Systems and methods for analyzing defects in CVD films
APPLIED MATERIALS INC0 citations59
US12230499B2Feb 18, 2025
Methods of post treating silicon nitride based dielectric films with high energy low dose plasma
APPLIED MATERIALS INC0 citations59
US11967524B2Apr 23, 2024
3D NAND gate stack reinforcement
APPLIED MATERIALS INC0 citations59
US11699623B2Jul 11, 2023
Systems and methods for analyzing defects in CVD films
APPLIED MATERIALS INC1 citations59
US11107674B2Aug 31, 2021
Methods for depositing silicon nitride
APPLIED MATERIALS INC0 citations50
US12094709B2Sep 17, 2024
Plasma treatment process to densify oxide layers
APPLIED MATERIALS INC0 citations47