Inventor
EBIZUKA YASUSHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “EBIZUKA YASUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
11 patentsUS10832886B2Nov 10, 2020
Beam irradiation device
HITACHI HIGH TECH CORP3 citations72
US9543113B2Jan 10, 2017
Charged-particle beam device for irradiating a charged particle beam on a sample
HITACHI HIGH TECH CORP2 citations72
US11056310B2Jul 6, 2021
Charged-particle beam device
HITACHI HIGH TECH CORP4 citations71
US9401297B2Jul 26, 2016
Electrostatic chuck mechanism and charged particle beam apparatus
HITACHI HIGH TECH CORP5 citations70
US11239042B2Feb 1, 2022
Beam irradiation device
HITACHI HIGH TECH CORP0 citations61
US9105446B2Aug 11, 2015
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations61
US11791124B2Oct 17, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations58
US11784023B2Oct 10, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations58
US12211194B2Jan 28, 2025
Defect inspection with images of different synthesis ratios
HITACHI HIGH TECH CORP0 citations57
US9799486B2Oct 24, 2017
Charged particle beam apparatus for measuring surface potential of a sample
HITACHI HIGH TECH CORP0 citations41
US9245710B2Jan 26, 2016
Charged particle beam device
HITACHI HIGH TECH CORP1 citations40