Inventor
BERLIN ANDY
US2 patents
Patents
2 patentsUS6954020B2Oct 11, 2005
Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications thereof
INTEL CORP94 citations94
US6747389B2Jun 8, 2004
Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications therefor
INTEL CORP2 citations59