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Inventor
REN ZIRU
CN
2 patents
Patents
2 patents
US7936406B2
May 3, 2011
Method and resulting capacitor structure for liquid crystal on silicon display devices
SEMICONDUCTOR MFG INT SHANGHAI
2 citations
57
US7645703B2
Jan 12, 2010
Method and structure for aluminum chemical mechanical polishing
SEMICONDUCTOR MFG INT SHANGHAI
2 citations
54