Inventor · disambiguated record

E-Wolfgang Frank

Also filed as: FRANK E-WOLFGANG

1 granted patent·4 citations·filing 1992–1992

24Inventor score

Technology areasH10P

Files withSIEMENS AG1

Top patents by PatentIndex Score

1 record

0124US5396184AMethod for the in situ identification of the sheet resistivity or, respectively, of process parameters of thin, electrically conductive layers manufactured under the influence of a plasmaSIEMENS AG·Filed 1992·Granted Mar 7, 1995·4 cites·11 claims

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