Inventor
FUKUMITSU MASAKAZU
JP18 patents
Patents
18 patentsUS11329624B2May 10, 2022
Resonator and resonance device
MURATA MANUFACTURING CO3 citations72
US10374569B2Aug 6, 2019
Resonance device and manufacturing method therefor
MURATA MANUFACTURING CO5 citations71
US11909379B2Feb 20, 2024
MEMS device having a connection portion formed of a eutectic alloy
MURATA MANUFACTURING CO0 citations62
US10934161B2Mar 2, 2021
MEMS device and method for producing same
MURATA MANUFACTURING CO0 citations62
US12552662B2Feb 17, 2026
Package structure and method for manufacturing the same
MURATA MANUFACTURING CO0 citations59
US12365583B2Jul 22, 2025
Resonance device with substrate having oxide film containing through hole and metal therin, and manufacturing method therefor
MURATA MANUFACTURING CO0 citations59
US12252393B2Mar 18, 2025
Resonance device and resonance device manufacturing method
MURATA MANUFACTURING CO0 citations59
US12494763B2Dec 9, 2025
Resonance device
MURATA MANUFACTURING CO0 citations53
US12143095B2Nov 12, 2024
Resonance device and manufacturing method
MURATA MANUFACTURING CO0 citations53
US11881838B2Jan 23, 2024
Resonance device and manufacturing method of resonance device
MURATA MANUFACTURING CO0 citations53
US11757425B2Sep 12, 2023
Resonance device and method for producing resonance device
MURATA MANUFACTURING CO0 citations53
US10497679B2Dec 3, 2019
Wafer level package and wafer level chip size package
MURATA MANUFACTURING CO0 citations51
US11753296B2Sep 12, 2023
MEMS device and method for manufacturing mems device
MURATA MANUFACTURING CO0 citations50
US11597648B2Mar 7, 2023
MEMS device manufacturing method and mems device
MURATA MANUFACTURING CO0 citations50
US12308821B2May 20, 2025
Resonator and resonance device
MURATA MANUFACTURING CO0 citations49
US12574006B2Mar 10, 2026
Resonator and resonance device
MURATA MANUFACTURING CO0 citations47
US10118247B2Nov 6, 2018
Method for bonding wafers
MURATA MANUFACTURING CO0 citations41
US9236357B2Jan 12, 2016
Mounting substrate and light emitting device
MURATA MANUFACTURING CO0 citations40