Inventor
ABRAHAM ZAMIR
IL2 patents
Patents
2 patentsUS7587700B2Sep 8, 2009
Process monitoring system and method for processing a large number of sub-micron measurement targets
APPLIED MATERIALS ISRAEL LTD2 citations57
US7856138B2Dec 21, 2010
System, method and computer software product for inspecting charged particle responsive resist
APPLIED MATERIALS ISRAEL LTD0 citations42