Inventor
ROSSING HARM ROELOF
NL2 patents
Patents
2 patentsUS6879866B2Apr 12, 2005
Method, computer program product and apparatus for scheduling maintenance actions in a substrate processing system
ASML NETHERLANDS BV37 citations85
US7046331B2May 16, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV15 citations80