Inventor
GITLIN BENJAMIN J
US3 patents
Patents
3 patentsUS11935726B2Mar 19, 2024
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC6 citations84
US11158488B2Oct 26, 2021
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC13 citations84
US11536755B2Dec 27, 2022
System and method for arc detection using a bias RF generator signal
MKS INSTR INC13 citations83