Inventor
SENZ VOLKMAR
DE17 patents
Patents
17 patentsUS11486782B2Nov 1, 2022
Micromechanical device and method for manufacturing a micromechanical device
BOSCH GMBH ROBERT4 citations71
US11060937B2Jul 13, 2021
Micromechanical pressure sensor
BOSCH GMBH ROBERT2 citations69
US11976996B2May 7, 2024
Micromechanical component for a capacitive pressure sensor device
BOSCH GMBH ROBERT1 citations62
US11933689B2Mar 19, 2024
MEMS capacitive sensor including improved contact separation
BOSCH GMBH ROBERT1 citations62
US7647832B2Jan 19, 2010
Micromechanical device and method for producing a micromechanical device
BOSCH GMBH ROBERT6 citations61
US12448280B2Oct 21, 2025
Bond structures on MEMS element and ASIC element
BOSCH GMBH ROBERT0 citations60
US11215509B2Jan 4, 2022
Method for determining a temperature without contact, and infrared measuring system
BOSCH GMBH ROBERT1 citations58
US11940345B2Mar 26, 2024
Micromechanical component for a capacitive pressure sensor device
BOSCH GMBH ROBERT0 citations51
US11441964B2Sep 13, 2022
Micromechanical pressure sensor device and corresponding manufacturing method
BOSCH GMBH ROBERT0 citations50
US12030773B2Jul 9, 2024
Method for producing a wafer connection
BOSCH GMBH ROBERT0 citations49
US12460981B2Nov 4, 2025
Micromechanical component for a capacitive pressure sensor device, capacitive pressure sensor device, and a manufacturing method for a capacitive pressure sensor device
BOSCH GMBH ROBERT0 citations44
US9923015B2Mar 20, 2018
Infrared photosensor
BOSCH GMBH ROBERT0 citations41
US9850120B2Dec 26, 2017
Micromechanical component having a diaphragm
BOSCH GMBH ROBERT0 citations39
US10816404B2Oct 27, 2020
Method for determining a temperature without contact, and infrared measuring system
BOSCH GMBH ROBERT0 citations37
US10442681B2Oct 15, 2019
Micromechanical system including a sensitive element and associated manufacturing method
BOSCH GMBH ROBERT0 citations37
US7667282B2Feb 23, 2010
Micromechanical component and method for manufacturing such a component
BOSCH GMBH ROBERT0 citations36
US9778323B2Oct 3, 2017
Magnetic sensor device and manufacturing method for a magnetic sensor device
BOSCH GMBH ROBERT0 citations33