Inventor
CLODGO DONNA J
US5 patents
Patents
5 patentsUS4723978AFeb 9, 1988
Method for a plasma-treated polysiloxane coating
IBM73 citations95
US4981530AJan 1, 1991
Planarizing ladder-type silsesquioxane polymer insulation layer
IBM43 citations92
US4606998AAug 19, 1986
Barrierless high-temperature lift-off process
IBM53 citations92
US5286572AFeb 15, 1994
Planarizing ladder-type silsequioxane polymer insulation layer
IBM18 citations73
US5166038ANov 24, 1992
Etch resistant pattern formation via interfacial silylation process
IBM2 citations56