Inventor

AHN TAE-HEUNG

KR4 patents

Patents

4 patents

US10001444B2Jun 19, 2018

Surface inspecting method

SAMSUNG ELECTRONICS CO LTD4 citations70

US11029256B2Jun 8, 2021

Apparatus for measuring wafer

SAMSUNG ELECTRONICS CO LTD2 citations60

US10473579B2Nov 12, 2019

Apparatus for inspecting material property of plurality of measurement objects

SAMSUNG ELECTRONICS CO LTD0 citations38

US10733719B2Aug 4, 2020

Wafer inspection apparatus and wafer inspection method using the same

SAMSUNG ELECTRONICS CO LTD0 citations33