Inventor

MUIJDERMAN JOHANNES HENDRIK EV

NL2 patents

Patents

2 patents

US7030958B2Apr 18, 2006

Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method

ASML NETHERLANDS BV31 citations88

US7145634B2Dec 5, 2006

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV4 citations58