Inventor

KOMURO KATSUO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KOMURO KATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CADENCE DESIGN SYSTEMS INC

2 patents

US7824828B2Nov 2, 2010

Method and system for improvement of dose correction for particle beam writers

CADENCE DESIGN SYSTEMS INC32 citations91

US7902528B2Mar 8, 2011

Method and system for proximity effect and dose correction for a particle beam writing device

CADENCE DESIGN SYSTEMS INC20 citations90

D2S INC

1 patent

US7914954B2Mar 29, 2011

Stencil, stencil design system and method for cell projection particle beam lithography

D2S INC0 citations50