Inventor
GU YEAHYUN
KR5 patents
Patents
5 patentsUS12243742B2Mar 4, 2025
Method for processing a substrate
ASM IP HOLDING BV0 citations60
US12020934B2Jun 25, 2024
Substrate processing method
ASM IP HOLDING BV1 citations60
US11658035B2May 23, 2023
Substrate processing method
ASM IP HOLDING BV1 citations60
US12431355B2Sep 30, 2025
Method and system for forming patterned features on a surface of a substrate using a plasma-enhanced cyclical deposition process
ASM IP HOLDING BV0 citations50
US12154824B2Nov 26, 2024
Substrate processing method
ASM IP HOLDING BV0 citations45